Study of heating effect in multi-beam mask writing

Autor: Ackmann, Paul W., Hayashi, Naoya, Kim, Jongsu, Kang, Jihoon, Noh, Inhwan, Lee, Sookhyun, Shin, Soeun, Lee, Sungil, Ha, Hyunchung, Lee, Hojune, Choi, Jin, Lee, Sanghee, Shin, Inkyun, Tamamushi, Shuichi, Jeon, Chan-Uk
Zdroj: Proceedings of SPIE; October 2014, Vol. 9235 Issue: 1 p92350Y-92350Y-8, 831159p
Databáze: Supplemental Index