EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
| Autor: | Ackmann, Paul W., Hayashi, Naoya, Takekoshi, Hidekazu, Nakayama, Takahito, Saito, Kenichi, Ando, Hiroyoshi, Inoue, Hideo, Nakayamada, Noriaki, Kamikubo, Takashi, Nishimura, Rieko, Kojima, Yoshinori, Yashima, Jun, Anpo, Akihito, Nakazawa, Seiichi, Iijima, Tomohiro, Ohtoshi, Kenji, Anze, Hirohito, Katsap, Victor, Golladay, Steven, Kendall, Rodney |
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| Zdroj: | Proceedings of SPIE; October 2014, Vol. 9235 Issue: 1 p92350X-92350X-8, 831159p |
| Databáze: | Supplemental Index |
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