The production of a novel stain-etched porous silicon, metallization of the porous surface and application in hydrocarbon sensors

Autor: Parbukov, A. N., Beklemyshev, V. I., Gontar, V. M., Makhonin, I. I., Gavrilov, S. A., Bayliss, S. C.
Zdroj: Materials Science and Engineering C: Biomimetic and Supramolecular Systems; 2001, Vol. 15 Issue: 1 p121-123, 3p
Databáze: Supplemental Index