Deposition and etch processes: continuum film evolution in microelectronics
| Autor: | Cale, T. S., Rogers, B. R., Merchant, T. P., Borucki, L. J. |
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| Zdroj: | Computational Materials Science; 1998, Vol. 12 Issue: 4 p333-353, 21p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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