X-ray photoelectron spectroscopy characterization of CNxthin films deposited by electron beam evaporation and nitrogen ion bombardment

Autor: Petrov, Peter, Dimitrov, D.B., Krastev, V., Georgiev, Ch., Popov, C.
Zdroj: Diamond and Related Materials; April-May 2000, Vol. 9 Issue: 3-6 p562-565, 4p
Abstrakt: Carbon nitride thin films have been deposited on Si(100) substrates by electron beam evaporation of graphite and simultaneous low energy nitrogen ion bombardment. The layers were analyzed by X-ray photoelectron spectroscopy. The synthesized layers are tetrahedrally bonded and amorphous, consisting of sp3-coordinated carbon with one nitrogen atom between its nearest neighbors. About 27% of the nitrogen is in CN bonds and some nitrogen is in CN bonds.
Databáze: Supplemental Index