A comparative study of elastic recoil detection analysis (ERDA), electron energy loss spectroscopy (EELS) and X-ray photoelectron spectroscopy (XPS) for structural analysis of amorphous carbon nitride films

Autor: Spaeth, C., Kuhn, M., Richter, F., Falke, U., Hietschold, M., Kilper, R., Kreissig, U.
Zdroj: Diamond and Related Materials; 1998, Vol. 7 Issue: 11 p1727-1733, 7p
Databáze: Supplemental Index
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