Deposition of cBN films by ion sputtering of SiB~6 and AlB~1~2 boron-base materials

Autor: Novikov, N. V., Voronkin, M. A., Zaika, N. I.
Zdroj: Diamond and Related Materials; 1998, Vol. 7 Issue: 11 p1693-1697, 5p
Databáze: Supplemental Index