Evidence of enhanced atomic hydrogen production with halogens in diamond MWPACVD

Autor: Ferreira, N. G., Corat, E. J., Trava-Airoldi, V. J., Leite, N. F., Bosco, E. Del
Zdroj: Diamond and Related Materials; 1998, Vol. 7 Issue: 1 p81-87, 7p
Databáze: Supplemental Index