Properties of aluminium nitride coating obtained by vacuum arc discharge method with plasma flow separation
Autor: | Inkin, V. N., Kirpilenko, G. G., Kolpakov, A. J. |
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Zdroj: | Diamond and Related Materials; 2001, Vol. 10 Issue: 3-7 p1314-1316, 3p |
Databáze: | Supplemental Index |
Externí odkaz: |