Electrostatically actuated MEMS switch with resistive contact

Autor: Orlikovsky, Alexander A., Uvarov, Ilya V., Naumov, Victor V., Selyukov, Roman V.
Zdroj: Proceedings of SPIE; December 2014, Vol. 9440 Issue: 1 p94400W-94400W-8, 849609p
Databáze: Supplemental Index