Electrostatically actuated MEMS switch with resistive contact
Autor: | Orlikovsky, Alexander A., Uvarov, Ilya V., Naumov, Victor V., Selyukov, Roman V. |
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Zdroj: | Proceedings of SPIE; December 2014, Vol. 9440 Issue: 1 p94400W-94400W-8, 849609p |
Databáze: | Supplemental Index |
Externí odkaz: |