| Autor: |
Przybylski, Jan, Majcher, Andrzej, Neska, Mirosław |
| Zdroj: |
Diffusion and Defect Data Part B: Solid State Phenomena; January 2015, Vol. 220 Issue: 1 p504-509, 6p |
| Abstrakt: |
The construction of technological test stands is connected with the problem of a proper determination of the structure of the stands enabling the execution of technological processes with different types of instruments and devices. The article presents the test stand for Plasma–Assisted Physical Vapour Deposition (PA-PVD) technological processes. The configurability of the stand was achieved thanks to the modular structure of the stand and the use of appropriate software and hardware solutions. The authors describe the developed solution facilitating the execution of plasma processes applied for surface engineering. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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