A micromachined surface work-function gas sensor for low-pressure oxygen detection
| Autor: | Bergstrom, P. L., Patel, S. V., Schwank, J. W., Wise, K. D. |
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| Zdroj: | Sensors and Actuators B: Chemical; 1997, Vol. 42 Issue: 3 p195-204, 10p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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