Resistance measurements of platinum-titania thin film gas detectors in ultra-high vacuum (UHV) and reactive ion etcher (RIE) systems
| Autor: | Walton, R. M., Liu, H., Gland, J. L., Schwank, J. W. |
|---|---|
| Zdroj: | Sensors and Actuators B: Chemical; 1997, Vol. 41 Issue: 1 p143-151, 9p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
Full Text from ScienceDirect