Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture
| Autor: | Temple-Boyer, P., Hajji, B., Alay, J. L., Morante, J. R., Martinez, A. |
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| Zdroj: | Sensors and Actuators A: Physical; 1999, Vol. 74 Issue: 1 p52-55, 4p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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