An electroformed CMOS integrated angular rate sensor
| Autor: | Chang, S., Chia, M., Castillo-Borelley, P., Higdon, W., Jiang, Q., Johnson, J., Obedier, L., Putty, M., Shi, Q., Sparks, D. |
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| Zdroj: | Sensors and Actuators A: Physical; 1998, Vol. 66 Issue: 1 p138-143, 6p |
| Databáze: | Supplemental Index |
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