High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
| Autor: | Burger, G. J., Smulders, E. J. T., Berenschot, J. W., Lammerink, T. S. J., Fluitman, J. H. J., Imai, S. |
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| Zdroj: | Sensors and Actuators A: Physical; 1996, Vol. 54 Issue: 1 p669-673, 5p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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