Self-organized technology of anisotropic etching of semiconductors for optoelectronics application
| Autor: | Dmitruk, N. L., Borkovskaya, O. Y., Mayeva, O. I., Kolbasov, G. Y., Mamontova, I. B. |
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| Zdroj: | Materials Science and Engineering B: Solid-State Materials for Advanced Technology; 2002, Vol. 88 Issue: 2-3 p277-281, 5p |
| Databáze: | Supplemental Index |
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