Proximity corrected accurate in-die registration metrology

Autor: Kato, Kokoro, Daneshpanah, M., Laske, F., Wagner, M., Roeth, K.-D., Czerkas, S., Yamaguchi, H., Fujii, N., Yoshikawa, S., Kanno, K., Takamizawa, H.
Zdroj: Proceedings of SPIE; July 2014, Vol. 9256 Issue: 1 p92560F-92560F-7, 833048p
Databáze: Supplemental Index