In-die registration measurement using novel model-based approach for advanced technology masks
| Autor: | Kato, Kokoro, Sato, Shunsuke, Laske, Frank, Kunitani, Shinji, Kamibayashi, Tatsuhiko, Fuse, Akira, Takahashi, Naoki, Roeth, Klaus-Dieter, Czerkas, Slawomir, Daneshpanah, Mehdi, Nagaoka, Yoshinori |
|---|---|
| Zdroj: | Proceedings of SPIE; July 2014, Vol. 9256 Issue: 1 p92560E-92560E-8, 833049p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|