Novel CD-SEM measurement methodology for complex OPCed patterns
| Autor: | Kato, Kokoro, Lee, Hyung-Joo, Park, Won Joo, Choi, Seuk Hwan, Chung, Dong Hoon, Shin, Inkyun, Kim, Byung-Gook, Jeon, Chan-Uk, Fukaya, Hiroshi, Ogiso, Yoshiaki, Shida, Soichi, Nakamura, Takayuki |
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| Zdroj: | Proceedings of SPIE; July 2014, Vol. 9256 Issue: 1 p92560D-92560D-10, 9163451p |
| Databáze: | Supplemental Index |
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