Development of an aluminum nitride-silicon carbide material set for high-temperature sensor applications

Autor: Senesky, Debbie G., Dekate, Sachin, Griffin, Benjamin A., Habermehl, Scott D., Clews, Peggy J.
Zdroj: Proceedings of SPIE; June 2014, Vol. 9113 Issue: 1 p91130A-91130A-9, 820180p
Databáze: Supplemental Index