The factors affecting improvement sensitivity, CDU, and resolution in EUV resist
| Autor: | Wood, Obert R., Panning, Eric M., Han, Joonhee, Lim, Hyun Soon, Kim, Jin Ho, Choi, Sumi, Shin, Jin Bong, Bae, Chang Wan, Yoo, In Young, Shin, Bong Ha, Lee, Eun Kyo, Joo, Hyun Sang, Seo, Dong Chul, Chun, Jun Sung |
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| Zdroj: | Proceedings of SPIE; April 2014, Vol. 9048 Issue: 1 p90482R-90482R-10, 8957729p |
| Databáze: | Supplemental Index |
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