Metrology of white light interferometer for TSV processing
| Autor: | Cain, Jason P., Sanchez, Martha I., Timoney, Padraig, Ko, Yeong-Uk, Fisher, Daniel, Lu, Cheng Kuan, Ramnath, Yudesh, Vaid, Alok, Thangaraju, Sarasvathi, Smith, Daniel, Kamineni, Himani, Zhang, Dingyou, Kim, Wonwoo, Alapati, Ramakanth, Peak, Jonathan, Amin, Hemant, Edmunson, Holly, Race, Joe, Peterson, Brennan, Johnson, Tim |
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| Zdroj: | Proceedings of SPIE; April 2014, Vol. 9050 Issue: 1 p90500F-90500F-8, 814509p |
| Databáze: | Supplemental Index |
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