Computational lithography platform for 193i-guided directed self-assembly
| Autor: | Lai, Kafai, Erdmann, Andreas, Lai, Kafai, Ozlem, Melih, Pitera, Jed W., Liu, Chi-chun, Schepis, Anthony, Dechene, Daniel, Krasnoperova, Azalia, Brue, Daniel, Abdallah, Jassem, Tsai, Hsinyu, Guillorn, Mike, Cheng, Joy, Doerk, Gregory, Tjio, Melia, Topalogu, Rasit, Fahkry, Moutaz, Lafferty, Neal |
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| Zdroj: | Proceedings of SPIE; April 2014, Vol. 9052 Issue: 1 p90521A-90521A-12, 8961592p |
| Databáze: | Supplemental Index |
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