High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Autor: Piyawattanametha, Wibool, Park, Yong-Hwa, Schmidt, Jan-Uwe, Dauderstaedt, Ulrike A., Duerr, Peter, Friedrichs, Martin, Hughes, Thomas, Ludewig, Thomas, Rudloff, Dirk, Schwaten, Tino, Trenkler, Daniela, Wagner, Michael, Wullinger, Ingo, Bergstrom, Andreas, Bjoernangen, Peter, Jonsson, Fredrik, Karlin, Tord, Ronnholm, Peter, Sandstrom, Torbjorn
Zdroj: Proceedings of SPIE; March 2014, Vol. 8977 Issue: 1 p89770O-89770O-10, 8887241p
Databáze: Supplemental Index