High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Autor: | Piyawattanametha, Wibool, Park, Yong-Hwa, Schmidt, Jan-Uwe, Dauderstaedt, Ulrike A., Duerr, Peter, Friedrichs, Martin, Hughes, Thomas, Ludewig, Thomas, Rudloff, Dirk, Schwaten, Tino, Trenkler, Daniela, Wagner, Michael, Wullinger, Ingo, Bergstrom, Andreas, Bjoernangen, Peter, Jonsson, Fredrik, Karlin, Tord, Ronnholm, Peter, Sandstrom, Torbjorn |
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Zdroj: | Proceedings of SPIE; March 2014, Vol. 8977 Issue: 1 p89770O-89770O-10, 8887241p |
Databáze: | Supplemental Index |
Externí odkaz: |