Micro-optics fabrication by mask-based and mask-less mixed lithography process towards 3D optical circuits
| Autor: | von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Summitt, Chris, Wang, Sunglin, Johnson, Lee, Zaverton, Melissa, Ge, Tao, Milster, Tom, Takashima, Yuzuru |
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| Zdroj: | Proceedings of SPIE; March 2014, Vol. 8974 Issue: 1 p89740C-89740C-6, 807667p |
| Databáze: | Supplemental Index |
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