A study of the defect detection technology using the optic simulation for the semiconductor device
| Autor: | Faure, Thomas B., Ackmann, Paul W., Yang, Yusin, Jeong, Yongdeok, Numata, Mitsunori, Park, Mira, Seo, Mingoo, Lee, SangKil, Jun, ChungSam, Lee, Kyupil, Cho, Insoo |
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| Zdroj: | Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p88801S-88801S-8, 799218p |
| Databáze: | Supplemental Index |
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