A study on the ESD damage of a silicon oxy-nitride hard mask on the chromium surface of PSM blank
| Autor: | Faure, Thomas B., Ackmann, Paul W., Moon, Songbae, Kim, Heebom, Shin, Inkyun, Jeon, Chanuk |
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| Zdroj: | Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p88801N-88801N-5, 799215p |
| Databáze: | Supplemental Index |
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