Development of hybrid fluid jet/float polishing process

Autor: Fähnle, Oliver W., Williamson, Ray, Kim, Dae Wook, Beaucamp, Anthony T. H., Namba, Yoshiharu, Freeman, Richard R.
Zdroj: Proceedings of SPIE; September 2013, Vol. 8838 Issue: 1 p88380P-88380P-7, 795428p
Databáze: Supplemental Index