Quantitative microscope characterization for optical measurements with sub-nm parametric uncertainties
| Autor: | Postek, Michael T., Orji, Ndubuisi George, Barnes, Bryan M., Qin, Jing, Zhou, Hui, Silver, Richard M. |
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| Zdroj: | Proceedings of SPIE; September 2013, Vol. 8819 Issue: 1 p88190E-88190E-7, 793718p |
| Databáze: | Supplemental Index |
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