Nanomanufacturing concerns about measurements made in the SEM I: imaging and its measurement

Autor: Postek, Michael T., Orji, Ndubuisi George, Postek, Michael T., Vladár, András E.
Zdroj: Proceedings of SPIE; September 2013, Vol. 8819 Issue: 1 p88190B-88190B-7, 793718p
Databáze: Supplemental Index