NSF nanomanufacturing program and its implications for measurement and control

Autor: Postek, Michael T., Orji, Ndubuisi George, Cooper, Khershed P.
Zdroj: Proceedings of SPIE; September 2013, Vol. 8819 Issue: 1 p88190A-88190A-5, 793716p
Databáze: Supplemental Index