Defect source analysis of directed self-assembly process (DSA of DSA)
| Autor: | Tong, William M., Resnick, Douglas J., Rincon Delgadillo, Paulina, Harukawa, Ryota, Suri, Mayur, Durant, Stephane, Cross, Andrew, Nagaswami, Venkat R., Van Den Heuvel, Dieter, Gronheid, Roel, Nealey, Paul |
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| Zdroj: | Proceedings of SPIE; March 2013, Vol. 8680 Issue: 1 p86800L-86800L-9, 781210p |
| Databáze: | Supplemental Index |
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