Reflective electron beam lithography: lithography results using CMOS controlled digital pattern generator chip
| Autor: | Tong, William M., Resnick, Douglas J., Gubiotti, Thomas, Sun, Jeff Fuge, Freed, Regina, Kidwingira, Francoise, Yang, Jason, Bevis, Chris, Carroll, Allen, Brodie, Alan, Tong, William M., Lin, Shy-Jay, Wang, Wen-Chuan, Haspeslagh, Luc, Vereecke, Bart |
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| Zdroj: | Proceedings of SPIE; March 2013, Vol. 8680 Issue: 1 p86800H-86800H-11, 8593212p |
| Databáze: | Supplemental Index |
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