Enhancing resolution with pupil filtering for projection printing systems with fixed or restricted illumination angular distribution
| Autor: | Naulleau, Patrick P., McIntyre, Greg, Teeuwen, Leon, Sohmen, Erik, Wood, Obert, Corliss, Daniel, van den Akker, Theo, Bouten, Sander, van Setten, Eelco, Voznyi, Oleg, Han, Sang-In, Bieg, Hermann, Burkhardt, Martin, Petrillo, Karen, Qi, Zhengqing John, Friz, Alexander |
|---|---|
| Zdroj: | Proceedings of SPIE; April 2013, Vol. 8679 Issue: 1 p86792N-86792N-15, 8592424p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|