MEMS pressure sensor fabricated by advanced bulk micromachining techniques
| Autor: | Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika, Vanko, Gabriel, Hudek, Peter, Zehetner, Johann, Dzuba, Jaroslav, Choleva, Pavlina, Vallo, Martin, Rýger, Ivan, Lalinský, Tibor |
|---|---|
| Zdroj: | Proceedings of SPIE; May 2013, Vol. 8763 Issue: 1 p87632U-87632U-8, 788697p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|