Measurement of the 1/f noise of lateral actuated MEMS with sidewall piezoresistors
| Autor: | Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika, Stavrov, Vladimir, Kohl, Franz, Sauter, Thilo, Philipov, Philip |
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| Zdroj: | Proceedings of SPIE; May 2013, Vol. 8763 Issue: 1 p87632S-87632S-6, 788695p |
| Databáze: | Supplemental Index |
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