MEMS sensors for mm-range displacement measurements with sub-nm resolution
| Autor: | Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika, Stavrov, Vladimir T., Todorov, Vencislav M., Shulev, Assen A., Hardalov, Chavdar M. |
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| Zdroj: | Proceedings of SPIE; May 2013, Vol. 8763 Issue: 1 p87632G-87632G-6, 788695p |
| Databáze: | Supplemental Index |
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