E-beam resist outgassing for study of correlation between resist sensitivity and e-beam optic contamination
| Autor: | Kato, Kokoro, Lee, Sung-Il, Jeong, Yun Song, Park, Cheol Hong, Kim, Hee Bom, Shin, Inkyun, Jeon, Chan-Uk |
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| Zdroj: | Proceedings of SPIE; June 2013, Vol. 8701 Issue: 1 p87010Z-87010Z-10, 8614001p |
| Databáze: | Supplemental Index |
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