Solutions with precise prediction for thermal aberration error in low-k1 immersion lithography
| Autor: | Conley, Will, Fukuhara, Kazuya, Mimotogi, Akiko, Kono, Takuya, Aoyama, Hajime, Ogata, Taro, Kita, Naonori, Matsuyama, Tomoyuki |
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| Zdroj: | Proceedings of SPIE; April 2013, Vol. 8683 Issue: 1 p86830U-86830U-7, 781478p |
| Databáze: | Supplemental Index |
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