Progress in directed self-assembly hole shrink applications
| Autor: | Somervell, Mark H., Younkin, Todd R., Gronheid, Roel, Rincon Delgadillo, Paulina, Chan, Boon Teik, Vandenbroeck, Nadia, Demuynck, Steven, Romo-Negreira, Ainhoa, Parnell, Doni, Nafus, Kathleen, Tahara, Shigeru, Somervell, Mark |
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| Zdroj: | Proceedings of SPIE; March 2013, Vol. 8682 Issue: 1 p86820L-86820L-11, 8595192p |
| Databáze: | Supplemental Index |
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