Hybrid approach to optical CD metrology of directed self-assembly lithography
| Autor: | Starikov, Alexander, Cain, Jason P., Godny, Stephane, Asano, Masafumi, Kawamoto, Akiko, Wakamoto, Koichi, Matsuki, Kazuto, Bozdog, Cornel, Sendelbach, Matthew, Turovets, Igor, Urenski, Ronen, Milo, Renan |
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| Zdroj: | Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p86812D-86812D-8, 781317p |
| Databáze: | Supplemental Index |
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