Inspection of high-aspect ratio layers at sub 20nm node
| Autor: | Starikov, Alexander, Cain, Jason P., Vikram, Abhishek, Lin, Kuan, Camp, Janay, Kini, Sumanth, Jin, Frank, Venkatesan, Vinod |
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| Zdroj: | Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p86811Q-86811Q-6, 781306p |
| Databáze: | Supplemental Index |
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