New technology for PACVD

Autor: McKenzie, D. R., McFall, W. D., Sainty, W. G., Yin, Y., Durandet, A., Boswell, R. W.
Zdroj: Surface and Coatings Technology; 1996, Vol. 82 Issue: 3 p326-333, 8p
Databáze: Supplemental Index