| Autor: |
Donohue, L.A., Cawley, J., Lewis, D.B., Brooks, J.S., Münz, W.-D. |
| Zdroj: |
Surface and Coatings Technology; November 1995, Vol. 77 Issue: 8-9 p149-158, 10p |
| Abstrakt: |
In this paper we report on third-generation TiA1N-ZrN superlattice thin films deposited at industrial scale on high speed steel and stainless steel substrates by a combined steered arc evaporation and unbalanced magnetron sputtering technique. The superlattice period and hence the mechanical and physical properties of the film were varied by modification of the rotation velocity and type of rotation (one-fold and three-fold). Characterization of the films was undertaken by a range of bulk and surface analysis techniques including scanning electron microscopy, X-ray diffraction, glow discharge optical emission spectrometry, hardness and adhesion measurement. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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