Direct plasma beam deposition of TiN~x layers with an r.f. plasma beam source
| Autor: | Weber, F. R., Oechsner, H. |
|---|---|
| Zdroj: | Surface and Coatings Technology; 1993, Vol. 59 Issue: 1 p234-234, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
| Autor: | Weber, F. R., Oechsner, H. |
|---|---|
| Zdroj: | Surface and Coatings Technology; 1993, Vol. 59 Issue: 1 p234-234, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|