Gas phase analysis of TiCl4 plasma processes by molecular beam mass spectrometry
| Autor: | Wierda, D. A., Reddy, C. M., Amato-Wierda, C. C. |
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| Zdroj: | Surface and Coatings Technology; 2001, Vol. 148 Issue: 2 p256-261, 6p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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