Diagnostic of a pulsed CH4-H2 plasma to improve microwave plasma assisted chemical vapour deposition process for diamond synthesis
| Autor: | Poucques, L. De, Henrion, G., Bougdira, J., Hugon, R. |
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| Zdroj: | Surface and Coatings Technology; 2001, Vol. 146 Issue: 1 p586-592, 7p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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