Some properties of TiO~2 layers prepared by medium frequency reactive sputtering

Autor: Szczyrbowski, J., Braeuer, G., Ruske, M., Bartella, J., Schroeder, J., Zmelty, A.
Zdroj: Surface and Coatings Technology; 1999, Vol. 112 Issue: 1 p261-266, 6p
Databáze: Supplemental Index