Optical emission spectroscopy on pulsed-DC plasmas used for TiN depositions
| Autor: | Mogensen, K. S., Eskildsen, S. S., Mathiasen, C., Boettiger, J. |
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| Zdroj: | Surface and Coatings Technology; 1998, Vol. 102 Issue: 1 p41-49, 9p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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